Reverse-absorbance-modulation-optical lithography for optical nanopatterning at low light levels

نویسندگان

  • Apratim Majumder
  • Xiaowen Wan
  • Farhana Masid
  • Benjamin J. Pollock
  • Trisha L. Andrew
  • Olivier Soppera
  • Rajesh Menon
چکیده

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تاریخ انتشار 2016